Abstract—In this paper, an analytical and simulation solution for Microelectromechanical systems (MEMS) based capacitive differential pressure sensor for aircraft altimeter is proposed. The principle and design of the proposed MEMS capacitive differential pressure sensor design is explained. Centre deflection and capacitive sensitivity analysis is carried out for circular, square and rectangle diaphragm membrane. Numerical analysis and simulation on deflection and capacitive sensitivity is carried out for the range of pressure from 100mbar to1100mbar. Gold, silicon and Liquid crystal polymer (LCP) material are selected as diaphragm membrane. Analysis and simulation result shows, that gold diaphragm membrane was more suitable for aircraft altimeter applications.

Index Terms—Capacitive pressure sensor, capacitive sensitivity, differential pressure sensor MEMS, microsensor, membrane diaphragm modeling, pressure sensitivity.

P. Eswaran is with Department of Electronics and Communication Engineering, SRM University, Kattankulathur, Chennai, Tamilnadu,, India. 603203 (e-mail: eswaran.p@ktr.srmuniv.ac.in).
S. Malarvizhi is with Department of Electronics and Communication Engineering, SRM University, Kattankulathur, Chennai, Tamilnadu, India. 603203.

Cite: P. Eswaran and S. Malarvizhi, "Design Analysis of MEMS Capacitive Differential Pressure Sensor for Aircraft Altimeter ," International Journal of Applied Physics and Mathematics  vol. 2, no. 1, pp. 014-020, 2012.